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Institut f. Physik FG Nanostrukturierte Materialien
Martin-Luther-Universitat Halle-Wittenberg
Von-Danckelmann-Platz 3, D-06120 Halle, Germany
Tel.: +49 345 55 25321
Fax.: +49 345 55 27034
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M. Tormen, T. Borzenko, B. Steffen, G. Schmidt, L.W. Molenkamp Sub-µm thick rubber-elastic stamp on rigid support for high reliability microcontact printing Microelectronic Engineering 61-62 (2015-02-24 16:31:49), 469-473
Microcontact printing (µCP) is very attractive as a low cost, high throughput, and sub-100-nm resolution lithography. However, macroscopic distortions (thermal expansion, swelling by the solvent-assisted procedure of inking, externally induced strain) as well as microscopic distortions (membrane relaxation in wide unsupported areas and merging of close features) compromise the quality of pattern transfer. We show that ultrathin (<1 µm) poly-dimethylsiloxane (PDMS) stamps fabricated directly on flat rigid substrates are capable of printing high-resolution, high-quality patterns on areas larger than 1 cm2. Moreover, sagging effect is avoided even for patterns with very low filling ratio (5% of the surface). The absence of stamp distortions has allowed to demonstrate 1 µm registration accuracy over areas of 5×5 mm2 in a mix and match process (µCP as a second step) using a homemade aligner. http://dx.doi.org/10.1016/S0167-9317(02)00519-1 |
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