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Institut f. Physik FG Nanostrukturierte Materialien
Martin-Luther-Universitat Halle-Wittenberg
Von-Danckelmann-Platz 3, D-06120 Halle, Germany
Tel.: +49 345 55 25321
Fax.: +49 345 55 27034
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T. Borzenko, V. Hock, D. Supp, C. Gould, G. Schmidt, L.W. Molenkamp Building and testing submicrometer metallic (gold) air-bridges for nanotransport applications Microelectronic Engineering 78-79 (2015-02-24 14:28:14), 374-380
The properties of submicrometer gold air-bridges are investigated for their suitability as elements of an electronic device. The fabrication procedure of a gated vertical quantum dot resonant tunneling diode structure implementing air-bridges is presented as a demonstration. Our investigations show that air-bridges produced by multiple acceleration voltage lithography exhibit excellent mechanical and electrical stability for nanotransport application. http://www.sciencedirect.com/science/article/pii/S0167931704005866 |
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